Environmental-friendly PECVD Chamber Cleaning
Together with our partner Solvay Fluor GmbH, we offer the knowledge and experience to implement a new, PFC-free cleaning process for almost all PECVD systems within the semiconductor industry worldwide.
The replacement of the currently used PECVD cleaning gases NF3, C2F6, C4F8, CF4 and SF6 is achieved by implementing an environmental-friendly F2-based cleaning gas mixture.
